316L Stainless Steel Metal Face Seal 3500psi Pressure Regulator Electropolished Tube Weld UHP Gases Pressure Regulator for Semiconductor Vacuum System

1. SS316L construction.

2. 10 µin. Surface finish.

3. Hastelloy internals for corrosion resistance.

4. For high flow rates at point of use application.

5. Cleaned,assembled and packaged for high purity semiconductor applications.

6. Each regulator is individually assembled,pressure tested,helium leak tested.

Body Material:	316L Stainless Steel
Port Type:	Face seal female Face seal male Tube weld stub available
Size:	1/4 in.
Port:	2 / 3 /4 ports
Inlet Pressure:	3,500psig (241 bar)
Delivery Pressure Range:	1 to 30psig (0.07 to 2 bar) 2 to 60psig (0.14 to 4 bar) 2 to 100psig (0.14 to 7 bar) 5 to 150psig (0.34 to 10 bar)
Series	UR100 Series

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Inconel® Incoloy® Monel® are Registered Trademarks of Special Metals Corporation and Its subsidiaries.

Hastelloy® is a Registered Trademark of Haynes International and Its subsidiaries.